Free press releases distribution network?

Agency / Source: Imec

Check Ads Availability|e-mail Article


Are you the owner of this article?, Turn it PREMIUM with your LOGO instead - and make it 3rd party Ads-Free! within the next hour!



Imec, Inpria and TEL Demonstrate Integrated Fab Process for Metal-oxide EUV Photoresist - imec, Inpria, and TEL will present the first integrated patterning process for next generation high-resolution devices using a non-chemically amplified metal containing photoresist and EUV lithography
Imec, Inpria and TEL Demonstrate Integrated Fab Process for Metal-oxide EUV Photoresist

 

PRZOOM - /newswire/ - Leuven, Belgium, 2016/02/22 - imec, Inpria, and TEL will present the first integrated patterning process for next generation high-resolution devices using a non-chemically amplified metal containing photoresist and EUV lithography.

   
 
Your Banner Ad Here instead - Showing along with ALL Articles covering Electronics/Instrumentation/RFID Announcements

Replace these Affiliate Programs at ANYTIME! Your banner here within the next hour. Learn How!


 

At this week’s SPIE Advanced Lithography Conference, nanoelectronics research center imec, Inpria, a company pioneering high performance EUV photoresists, and TEL, a semiconductor/flat panel display production equipment company, will present the first integrated patterning process for next generation high-resolution devices using a non-chemically amplified metal containing photoresist and EUV lithography.

The novel metal-oxide photoresist based process enables a significant process simplification and cost reduction compared to fab processes based on traditional organic EUV photoresists. The team transferred the metal-oxide photoresist process from lab to the fab, demonstrating manufacturing compatibility with standard fab equipment and excellent pattern transfer capability using ASML’s EUV NXE3300 full field scanner tool and imec’s integrated process line.

A negative tone metal-oxide EUV resist was developed by Inpria and integrated into imec’s 7nm BEOL process module on TEL’s etching system, more specifically as a block mask layer for metal patterning with pillar dimensions as small as 21nm. The intrinsic metal-oxide properties enabled the photoresist to also serve as a thin spin-on hard mask for the subsequent etching step. Moreover, because of the nature of the negative tone imaging of the photoresist, further simplification in the litho-etch patterning scheme is possible, as it eliminates the tone reversal scheme required by the conventional positive tone approaches for this block patterning layer.

About imec

Imec (imec.be) performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, USA, China, India and Japan. Its staff of about 2,200 people includes almost 700 industrial residents and guest researchers. In 2014, imec's revenue (P&L) totaled 363 million euro. Further information on imec can be found at imec.be. Stay up to date about what’s happening at imec with the monthly imec magazine, available for tablets and smartphones (as an app for iOS and Android), or via the website.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.)and imec China (IMEC Microelectronics (Shanghai) Co. Ltd.) and imec India (Imec India Private Limited).

About Inpria

Inpria Corporation (inpria.com) is an innovator in extending semiconductor lithography through inorganic EUV photoresists for nanoscale patterning. Inpria’s molecular oxide materials offer customers the unique ability to deposit directly from solution with conventional fab equipment atomically smooth, intrinsically dense, and directly photo-patternable metal oxide films, enabling advanced performance with simplified processing.

About TEL

As a leading global supplier of semiconductor and flat panel display (FPD) production equipment, Tokyo Electron Limited (TEL) engages in development, manufacturing, and sales in a wide range of product fields. All of TEL's semiconductor and FPD production equipment product lines maintain high market shares in their respective global segments. TEL provides outstanding products and services to customers through a global network of approximately 80 locations in 16 countries and regions in the U.S., Europe, and Asia.

TEL (tel.com) is a trademark of Tokyo Electron Limited.

 
 
Your Banner Ad Here instead - Showing along with ALL Articles covering Electronics/Instrumentation/RFID Announcements

Replace these Affiliate Programs at ANYTIME! Your banner here within the next hour. Learn How!


 

Agency / Source: Imec

 
 

Availability: All Regions (Including Int'l)

 

Traffic Booster: [/] Quick PRZOOM - Press & Newswire Visibility Checker

 

Distribution / Indexing: [+] / [Company listed above is a registered member of our network. Content made possible by PRZOOM / PRTODAY indexing services]

 
 
# # #
 
 
  Your Banner Ad showing on ALL
Electronics/Instrumentation/RFID articles,
CATCH Visitors via Your Competitors Announcements!


Imec, Inpria and TEL Demonstrate Integrated Fab Process for Metal-oxide EUV Photoresist

Company website links NOT available to basic submissions
It is OK to republish and/or LINK any newswire for any legitimate media purpose as long as you name PRZOOM - Press & Newswire and LINK as the source.
 
  For more information, please visit:
Is this your article? Activate ALL web links by Upgrading to Press Release PREMIUM Plan Now!
Imec |
Contact: Hanne Degans - imec.be 
+32 16 28 17 69 / +32 486 06 51 75 (Mobile) hanne.degans[.]imec.be
 
PRZOOM / PRTODAY - Newswire Today disclaims any content contained in this article. If you need/wish to contact the company who published the current release, you will need to contact them - NOT us. Issuers of articles are solely responsible for the accuracy of their content. Our complete disclaimer appears here.
IMPORTANT INFORMATION: Issuance, publication or distribution of this press release in certain jurisdictions could be subject to restrictions. The recipient of this press release is responsible for using this press release and the information herein in accordance with the applicable rules and regulations in the particular jurisdiction. This press release does not constitute an offer or an offering to acquire or subscribe for any Imec securities in any jurisdiction including any other companies listed or named in this release.

Electronics/Instrumentation/RFID via RSSAdd NewswireToday - PRZOOM Headline News to FeedBurner
Find who RetweetFollow @NewswireTODAY



Are you the owner of this article?, Turn it PREMIUM with your LOGO instead - and make it 3rd party Ads-Free! within the next hour!




Read Latest Press Releases From Imec / Company Profile


Read Electronics/Instrumentation/RFID Most Recent Related Press Releases:

Malvern Instruments and PANalytical to Merge
Bruker Announces Corporate Partnership with International Phenome Centre Network (IPCN) for NMR Technologies and SOPs
Predictive and Control Capabilities through IoT Rapidly Expand Global Growth Opportunities for Sensors Finds Frost & Sullivan
IDEX Showcased the World’s First Flexible Touch Fingerprint Sensor for SmartCards and Receives Massive Industry Interest
Endress+Hauser Consult AG Introduces Proline 300/500 - Flow Measuring Technology for the Future
Lipigas Delivers Enhanced Interactive and Visual Mobile Self-Service Portal Using Joint Visual IVR Solution from Dialogic and Telectronic
Customized Electronic Ticket Solutions Simplify Daily Commute in Russian Cities
Bruker AXS Introduces A New Member to The D8 ADVANCE Family - The D8 ADVANCE Plus™
Spellman to Exhibit at the 2016 Radiological Society of North America Meeting in Chicago
Infineon Teams Up with Chinese Appliance Manufacturers for Solutions

Boost Your Social Network
& Crowdfunding Campaigns


LIFETIME SOCIAL MEDIA WALL
 
NewswireToday Celebrates 10 Years in Business
Find business coaching, life coaching, executive coaching and corporate coaching, best selling coaching books, ...



PREMIUM Members


Visit  BizJobs.com

Visit  Triggr & Bloom

Visit  La Bella Bakery Artisan Bakery Arizona







 
  ©2016 PRZOOM — Limelon Advertising, Co.
Home | About PRZOOM | Advertise/Pricing | Contact | Investors | Privacy/TOS | Sitemap | FRANCAIS
newswire, PR free press releases distribution service magazines engine news alert newsroom press room breaking news public relations articles company news alerts newswiredistribution ezine bizentrepreneur biznewstoday digital business report market search pr firms agencies reports distri-bution today investor relation successful internet entrepreneur newswire distribution prtoday.com freenewswiredistribution asianewstoday bizwiretoday USA pr UK today