Free press releases distribution network?

Agency / Source: Imec

Check Ads Availability|e-mail Article


Are you the owner of this article?, Turn it PREMIUM with your LOGO instead - and make it 3rd party Ads-Free! within the next hour!



Imec and Tokyo Electron Demonstrate Electrical Advantages of Direct Cu Etch Scheme for Advanced Interconnects - At the IEEE IITC conference, nano-electronics research center imec and Tokyo Electron Limited (TEL) presented a direct Cu etch scheme for patterning Cu interconnects - TEL.com / imec.be
Imec and Tokyo Electron Demonstrate Electrical Advantages of Direct Cu Etch Scheme for Advanced Interconnects

 

PRZOOM - /newswire/ - Grenoble, Isère‎, France, 2015/05/20 - At the IEEE IITC conference, nano-electronics research center imec and Tokyo Electron Limited (TEL) presented a direct Cu etch scheme for patterning Cu interconnects - TEL.com / imec.be.

   
 
Your Banner Ad Here instead - Showing along with ALL Articles covering Electronics/Instrumentation/RFID Announcements

Replace these Affiliate Programs at ANYTIME! Your banner here within the next hour. Learn How!


 

The new scheme has great potential to overcome resistivity and reliability issues that occur while scaling conventional Cu damascene interconnects for advanced nodes.

Aggressive scaling of damascene Cu interconnects leads to a drastic increase in the resistivity of the Cu wires, due to the fact that grain size is limited by the damascene trenches, which results in increased grain boundary and surface scattering. Additionally, the grain boundary negatively influences electromigration. When scaling damascene Cu interconnects, reliability issues occur because the overall copper volume is reduced and interfaces become dominant. Imec and TEL have demonstrated the feasibility of a direct Cu etch scheme to replace the conventional Cu damascene process. A key advantage of the direct Cu etch process is that it systematically results in larger grain sizes. Moreover, electromigration performance is preserved by applying an in-situ SiN cap layer that protects the Cu wires from oxidation and serves as the Cu interface.

The results were achieved in cooperation with imec’s key partners in its core CMOS programs GLOBALFOUNDRIES, Inc., Intel Corp, Micron Technology, Inc., Panasonic Corporation, Samsung Electronics Co., Ltd.,, Taiwan Semiconductor Manufacturing Co., Ltd., SK hynix Inc., Fujitsu Semiconductor Ltd., and Sony Corporation.

About imec
Imec (imec.be) performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, USA, China, India and Japan. Its staff of about 2,200 people includes almost 700 industrial residents and guest researchers. In 2014, imec's revenue (P&L) totaled 363 million euro.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.)and imec China (IMEC Microelectronics (Shanghai) Co. Ltd.) and imec India (Imec India Private Limited).

About Tokyo Electron Limited (TEL)
As a leading global supplier of semiconductor and flat panel display (FPD) production equipment, Tokyo Electron Limited (TEL.com) engages in development, manufacturing, and sales in a wide range of product fields. All of TEL's semiconductor and FPD production equipment product lines maintain high market shares in their respective global segments. TEL provides outstanding products and services to customers through a global network of approximately 80 locations in 16 countries in the U.S., Europe, and Asia.

TEL is a registered trademark or a trademark of Tokyo Electron Limited in Japan and/or other countries.

 
 
Your Banner Ad Here instead - Showing along with ALL Articles covering Electronics/Instrumentation/RFID Announcements

Replace these Affiliate Programs at ANYTIME! Your banner here within the next hour. Learn How!


 

Agency / Source: Imec

 
 

Availability: All Regions (Including Int'l)

 

Traffic Booster: [/] Quick PRZOOM - Press & Newswire Visibility Checker

 

Distribution / Indexing: [+] / [Company listed above is a registered member of our network. Content made possible by PRZOOM / PRTODAY indexing services]

 
 
# # #
 
 
  Your Banner Ad showing on ALL
Electronics/Instrumentation/RFID articles,
CATCH Visitors via Your Competitors Announcements!


Imec and Tokyo Electron Demonstrate Electrical Advantages of Direct Cu Etch Scheme for Advanced Interconnects

Company website links NOT available to basic submissions
It is OK to republish and/or LINK any newswire for any legitimate media purpose as long as you name PRZOOM - Press & Newswire and LINK as the source.
 
  For more information, please visit:
Is this your article? Activate ALL web links by Upgrading to Press Release PREMIUM Plan Now!
Imec | Tokyo Electron Limited
Contact: Hanne Degans - imec.be 
+32 16 28 17 69 / +32 486 06 51 75 (mobile) hanne.degans[.]imec.be
 
PRZOOM / PRTODAY - Newswire Today disclaims any content contained in this article. If you need/wish to contact the company who published the current release, you will need to contact them - NOT us. Issuers of articles are solely responsible for the accuracy of their content. Our complete disclaimer appears here.
IMPORTANT INFORMATION: Issuance, publication or distribution of this press release in certain jurisdictions could be subject to restrictions. The recipient of this press release is responsible for using this press release and the information herein in accordance with the applicable rules and regulations in the particular jurisdiction. This press release does not constitute an offer or an offering to acquire or subscribe for any Imec securities in any jurisdiction including any other companies listed or named in this release.

Electronics/Instrumentation/RFID via RSSAdd NewswireToday - PRZOOM Headline News to FeedBurner
Find who RetweetFollow @NewswireTODAY



Are you the owner of this article?, Turn it PREMIUM with your LOGO instead - and make it 3rd party Ads-Free! within the next hour!




Read Latest Press Releases From Imec / Company Profile


Read Electronics/Instrumentation/RFID Most Recent Related Press Releases:

Imec Develops 3D-Compatible Germanium nMOS Gate stack with High Mobility and Superior Reliability
Curtiss-Wright to Expand Position in Data Acquisition & FTI Markets with Acquisition of Teletronics Technology Corporation
Datalogic Receives Top Honor At Inspect Awards 2017
Leonardo Sees Surge in Export Orders for Man-portable Laser Designators from US and Europe
Imec Demonstrates World’s First Vertically Stacked Gate-all-Around Si Nanowire CMOS Transistors
GE Ventures, Microsemi and Corning Partner to Launch Menlo Micro and Next Generation of Electronic Switching
Frost & Sullivan Commends LeEco for Driving Innovation in the North American Smart Technologies Market
Malvern Instruments and PANalytical to Merge
Bruker Announces Corporate Partnership with International Phenome Centre Network (IPCN) for NMR Technologies and SOPs
Predictive and Control Capabilities through IoT Rapidly Expand Global Growth Opportunities for Sensors Finds Frost & Sullivan

Boost Your Social Network
& Crowdfunding Campaigns


LIFETIME SOCIAL MEDIA WALL
 
NewswireToday Celebrates 10 Years in Business
Find business coaching, life coaching, executive coaching and corporate coaching, best selling coaching books, ...



PREMIUM Members


Visit  La Bella Bakery Artisan Bakery Arizona

Visit  BizJobs.com

Visit  Triggr & Bloom







 
  ©2016 PRZOOM — Limelon Advertising, Co.
Home | About PRZOOM | Advertise/Pricing | Contact | Investors | Privacy/TOS | Sitemap | FRANCAIS
newswire, PR free press releases distribution service magazines engine news alert newsroom press room breaking news public relations articles company news alerts newswiredistribution ezine bizentrepreneur biznewstoday digital business report market search pr firms agencies reports distri-bution today investor relation successful internet entrepreneur newswire distribution prtoday.com freenewswiredistribution asianewstoday bizwiretoday USA pr UK today