The new agreement comprises joint R&D on advanced STT-MRAM (spin-transfer torque magnetoresistive random access memory) within imec’s research and development program on emerging memory technologies.
The collaboration between imec and TEL on STT-MRAM technology is an excellent opportunity for TEL to accelerate the development of its next-generation etch tools for high-density emerging memory technologies. As part of the collaboration, TEL’s Tactras etch tool has been installed in imec’s 300mm clean room, complementing imec’s 300mm dedicated STT-MRAM tool set. The Tactras tool enables imec and TEL to jointly develop the patterning processes for high-density STT-MRAM technology. The tool is designed for in-situ cluster patterning of the Magnetic Tunnel Junction (MTJ) stack, which is key for advanced memory technology nodes.
“We are pleased to intensify our collaboration with TEL, as it is a confirmation of the value imec offers to its industrial partners,” stated Laith Altimime, Director CMOS Technology at imec. “As a globally operating R&D center, imec is addressing a real need of the semiconductor industry. We offer the technology platforms to our global partners and enable close interaction with all companies in our partner eco system and sharing expertise and knowledge across the value chain. This enhances the process of innovation benefiting from a cost-sharing and risk-sharing basis.”
“TEL is pleased to further strengthen the collaboration with imec, a known leader in the area of advanced semiconductor material and device R&D on state-of-the-art process equipment,” stated Dr. Akihisa Sekiguchi, VP & GM of SPE Marketing at Tokyo Electron Limited. “Imec offers a unique research environment which has proved very valuable as an extension of our own internal R&D.”
Imec (imec.be) performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of close to 2,000 people includes more than 600 industrial residents and guest researchers. In 2011, imec's revenue (P&L) was about 300 million euro.
Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).
About Tokyo Electron (TEL)
Tokyo Electron Ltd (TEL.com), established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. Product lines include coater/developers, thermal processing systems, plasma etch systems, CVD systems, surface preparation systems, and test systems. To support this diverse product base, TEL has strategically located research and development, manufacturing, sales, and service locations all over the world. TEL is a publicly held company listed on the Tokyo Stock Exchange.